Atomic-order thermal nitridation of group IV semiconductors for ultra-large-scale integration
نویسندگان
چکیده
منابع مشابه
Atomic-order thermal nitridation of group IV semiconductors for ultra-large-scale integration
One of the main requirements for ultra-large-scale integration (ULSI) is atomic-order control of process technology. Our concept of atomically controlled processing for group IV semiconductors is based on atomic-order surface reaction control in Si-based CVD epitaxial growth. On the atomic-order surface nitridation of a few nm-thick Ge/about 4 nm-thick Si0.5Ge0.5/Si(100) by NH3, it is found tha...
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متن کاملThermal conductivity of group-IV semiconductors from a kinetic-collective model
The thermal conductivity of group-IV semiconductors (silicon, germanium, diamond and grey tin) with several isotopic compositions has been calculated from a kinetic-collective model. From this approach, significantly different to Callaway-likemodels in its physical interpretation, the thermal conductivity expression accounts for a transition from a kinetic (individual phonon transport) to a col...
متن کاملThermal conductivity of group-IV semiconductors from a kinetic-collective model.
The thermal conductivity of group-IV semiconductors (silicon, germanium, diamond and grey tin) with several isotopic compositions has been calculated from a kinetic-collective model. From this approach, significantly different to Callaway-like models in its physical interpretation, the thermal conductivity expression accounts for a transition from a kinetic (individual phonon transport) to a co...
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ژورنال
عنوان ژورنال: Advances in Natural Sciences: Nanoscience and Nanotechnology
سال: 2014
ISSN: 2043-6262
DOI: 10.1088/2043-6262/6/1/015001